Coherent FieldMaxII-TOP Dokumentacja Pobierz pdf (Strona 49)

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Adjustable

225.55 mm (8.88 in.) Max.

143.00 mm (5.63 in.) Min.

M6-6H THD

X 6.10 mm (0.24 in.)

and No. 1/4-20 UNC-2B THD

X 6.10 mm (0.24 in.)

for Mounting Sensor

Ø 76.20 mm

(3.0 in.)

Ø 51.00 mm (2.01 in.)

21.56 mm

(0.85 in.)

76.20 mm

(3.0 in.)

50.80 mm

(2.0 in.)

2X 5.08 mm

(0.20 in.)

Adjustable

200.15 mm (7.88 in.) Max.

117.60 mm (4.63 in.) Min.

Aperture Plate

M6-6H THD

X 5.08 mm (0.20 in.)

and No. 1/4-20 UNC-2B THD

X 5.08 mm (0.20 in.)

for Mounting Sensor

Ø 50.80 mm

(2.0 in.)

Ø 25.25 mm (0.99 in.)

Note: Detector Surface

is 3.81 mm (0.15 in.)

Below Front Face of

Aperture Plate

16.54 mm

(0.65 in.)

76.20 mm

(3.0 in.)

50.80 mm

(2.0 in.)

2X 5.84 mm

(0.23 in.)

Laser

Cross-

Reference

Index

POWER

& ENERGY

Power

Sensors

Energy

Sensors

Custom

& OEM

BEAM

DIAGNOSTICS

CALIBRATION

& SERVICE

INDICES

Product

Name

Index

Power

& Energy

Meters

MaxUV Coating

EnergyMax Sensors

Features

• Unique MaxUV coating delivers highest DUV damage threshold

and long-term UV exposure resistance

• Operate over the 190 nm to 2.1 μm range

• Enable pulse energy measurements from 50 μJ to 1J

• Measure up to 400 Hz repetition rate

• Spectral compensation characteristics built into each unit

• Onboard sensors provide automatic temperature compensation

Model J-50MUV-248 J-50MUV-248 J-50MUV-193 J-50MUV-193 J-25MUV-248 J-25MUV-193

w/o Diffuser w/Diffuser w/o Diffuser w/Diffuser w/o Diffuser w/o Diffuser

Energy Range 500 µJ to 500 µJ to 125 µJ to 125 µJ to 125 µJ to 50 µJ to

1J 1J 250 mJ 250 mJ 250 mJ 100 mJ

Noise Equivalent Energy (µJ) <16 <16 <4 <4 <4 <2

Wavelength Range (µm) 0.19 to 2.1 0.19 to 0.266 0.19 to 2.1 0.19 to 0.266 0.19 to 2.1 0.19 to 2.1

Active Area Diameter (mm) 50 50 50 50 25 25

Max. Average Power (W) 10 15 10 18 5 5

Max. Pulse Width (µs) 86 86 86 86 43 43

Max. Rep. Rate (pps) 200 200 200 200 400 400

Max. Energy Density 260 520 200 400 260 200

(mJ/cm

) (at 248 nm, (at 248 nm, (at 193 nm, (at 193 nm, (at 248 nm, (at 193 nm,

10 ns) 10 ns) 10 ns) 10 ns) 10 ns) 10 ns)

Detector Coating MaxUV

Diffuser No DUV No DUV No No

Calibration Wavelength (nm) 248 248 193 193 248 193

Calibration Uncertainty (%) ±3

Energy Linearity (%) ±3

Cable Length (m) 2.5

Cable Type J DB-25

Part Number 1146243 1110572 1146237 1110575 1110745 1110741

Device

Specications

MaxUV-coated EnergyMax sensors are specically optimized for use with

ArF lasers operating at 193 nm and KrF lasers at 248 nm. These sensors

feature high accuracy and large active areas (up to 50 mm), and use a

unique coating called MaxUV that delivers superior long-term damage

resistance.

Two of the 50 mm diameter models incorporate a DUV quartz diffuser for

increased resistance to coating damage.

J-50MUV-248 and -193 J-25MUV-248 and -193

1 2 ... 44 45 46 47 48 49 50 51 52 53 54 ... 91 92

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